Services

The Engineering Unit team supports the Quantum Center groups in the areas of FPGA programming and verification, cryogenics, micro- and nano-fabrication, and PCB- and RF-design.

Expertise

  • DSP block implementation
  • System controller implementation
  • Peripheral interface implementation
  • Verification

For more information, please contact Abdulkadir Akin

Expertise

Micro- and nano-fabrication

  • Substrate cleaning (RCA1, RCA2, Piranha, HF, solvent)
  • Mask fabrication
  • UV/DUV photolithography
  • Direct laser writing (mask, wafer)
  • RIE/ICP etching
  • Wet etching (metals, oxides, nitrides and silicon)
  • 100 kV electron-beam lithography (pattern generation, fracturing, beam-parameter optimization, PEC)
  • Process optimization and custom process development

Thin-film deposition

  • HV/UHV magnetron sputtering deposition of metals (Nb, NbTi, Al, Ti, Ta) and metal nitrides
  • E-beam deposition of metals (Ti, Cr, Au, Al, Mo, W, Cu) and oxides (SiO2, Al2O3)
  • Plasma-enhanced chemical vapour deposition (SiO2, Si3N4)
  • Compatible substrates: Small dies up to 4-inch substrates. 

Characterization

  • Spectroscopic ellipsometry/reflectometry
  • Scanning electron microscopy (SEM, EBSD, EDX)
  • X-ray diffraction
  • Focused ion beam (cross-section imaging, patterning, TEM lamella)
  • Atomic force microscopy (AFM)
  • Mechanical profilometry

Consultation

  •  Low-cost fabrication techniques 
    - Nanoimprint lithography (UV, thermal)
    - Stencil lithography
    - Colloidal lithography
  • Batch processing

For more information, please contact Mohsen Bahrami Panah

Expertise

  • FPGA board design
  • Peripheral card design

For more information, please contact Peter Clements

Expertise

  • technical consultancy in the field of cryogenics, vacuum and mechanical vibration isolation
  • selection of materials, components and manufacturing processes for cryogenic and vacuum systems
  • design of parts and devices operating in cryogenic and vacuum conditions
  • solutions for isolation of mechanical vibrations

For more information, please contact Maciej Dziewiecki

Expertise

  • Field simulations
  • RF measurements

For more information, please contact Bernhard Zybach  

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